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Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0

By: Publication details: CRC Press, Boca Raton, Boca Raton 2012Edition: 3rdISBN:
  • 978-1-4200-5516-0
DDC classification:
  • GF:(D65)/
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