APA
Madou Marc J, . (2012). Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0. : CRC Press, Boca Raton, Boca Raton.
Chicago
Madou Marc J, . 2012. Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0. : CRC Press, Boca Raton, Boca Raton.
Harvard
Madou Marc J, . (2012). Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0. : CRC Press, Boca Raton, Boca Raton.
MLA
Madou Marc J, . Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0. : CRC Press, Boca Raton, Boca Raton. 2012.