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Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0

Madou Marc J

Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0 - 3rd - CRC Press, Boca Raton, Boca Raton 2012

ISBN: 978-1-4200-5516-0

Dewey Class. No.: GF:(D65)/

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Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0