| 000 | 00389nam a2200109Ia 4500 | ||
|---|---|---|---|
| 100 | _aMadou Marc J | ||
| 250 | _a3rd | ||
| 020 | _a978-1-4200-5519-1 | ||
| 245 | _aFundamentals of Microfabrication and Nanotechnology Vol 2 : (Manufacturing Techniques for Microfabrication and Nanotechnology .-3rd .-978-1-4200-5519-1 | ||
| 260 |
_bCRC Press, Boca Raton, Boca Raton _c2012 |
||
| 082 | _aGF:(D65)/ | ||
| 999 |
_c41631 _d41631 |
||