| 000 | 00408nam a2200109Ia 4500 | ||
|---|---|---|---|
| 100 | _aMadou Marc J | ||
| 250 | _a3rd | ||
| 020 | _a978-1-4200-5511-5 | ||
| 245 | _aFundamentals of Microfabrication and Nanotechnology Vol 1 : Solid-state Physics, Fluidics, and Analytical Techniques in micro and Nanotechnology .-3rd .-978-1-4200-5511-5 | ||
| 260 |
_bCRC Press, Boca Raton, Boca Raton _c2012 |
||
| 082 | _aGF:(D65)/ | ||
| 999 |
_c17940 _d17940 |
||