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1.
Fundamentals of Microfabrication and Nanotechnology Vol 1 : Solid-state Physics, Fluidics, and Analytical Techniques in micro and Nanotechnology .-3rd .-978-1-4200-5511-5 by
Edition: 3rd
Publication details: CRC Press, Boca Raton, Boca Raton 2012
Availability: Items available for loan: Agharkar Research Institute (1)Call number: GF:(D65)/.

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2.
Fundamentals of Microfabrication : The Science of miniaturization .-2nd edn Spl Indian by
Edition: 2nd edn Spl Indian
Publication details: CRC Press, London, London 2002
Availability: Items available for loan: Agharkar Research Institute (1)Call number: GF: (D65)/.

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3.
Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0 by
Edition: 3rd
Publication details: CRC Press, Boca Raton, Boca Raton 2012
Availability: Items available for loan: Agharkar Research Institute (1)Call number: GF:(D65)/.

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4.
Fundamentals of Microfabrication and Nanotechnology Vol 2 : (Manufacturing Techniques for Microfabrication and Nanotechnology .-3rd .-978-1-4200-5519-1 by
Edition: 3rd
Publication details: CRC Press, Boca Raton, Boca Raton 2012
Availability: Items available for loan: Agharkar Research Institute (1)Call number: GF:(D65)/.

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