TY  - BOOK
AU  - Madou Marc J
TI  - Fundamentals of Microfabrication and Nanotechnology Vol 2 : (Manufacturing Techniques for Microfabrication and Nanotechnology .-3rd .-978-1-4200-5519-1
SN  - 978-1-4200-5519-1
U1  - GF:(D65)/ 
PY  - 2012///
PB  - CRC Press, Boca Raton, Boca Raton
ER  -