Madou Marc J <br/><br/>
Fundamentals of Microfabrication and Nanotechnology Vol 2 : (Manufacturing Techniques for Microfabrication and Nanotechnology .-3rd .-978-1-4200-5519-1 

 - 3rd  
 -  CRC Press, Boca Raton, Boca Raton  2012 
<br/><br/><label>ISBN: </label>978-1-4200-5519-1 
<br/><br/><label>Dewey Class. No.: </label>GF:(D65)/