TY  - BOOK
AU  - Madou Marc J
TI  - Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0
SN  - 978-1-4200-5516-0
U1  - GF:(D65)/ 
PY  - 2012///
PB  - CRC Press, Boca Raton, Boca Raton
ER  -