Madou Marc J <br/><br/>
Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0 

 - 3rd  
 -  CRC Press, Boca Raton, Boca Raton  2012 
<br/><br/><label>ISBN: </label>978-1-4200-5516-0 
<br/><br/><label>Dewey Class. No.: </label>GF:(D65)/