Madou Marc J Fundamentals of Microfabrication and Nanotechnology Vol 3 : From MEMS to Bio-MEMS and Bio-NEMS (Manufacturing Techniques and Application .-3rd .-978-1-4200-5516-0 - 3rd - CRC Press, Boca Raton, Boca Raton 2012 ISBN: 978-1-4200-5516-0 Dewey Class. No.: GF:(D65)/