TY  - BOOK
AU  - Madou Marc J
TI  - Fundamentals of Microfabrication and Nanotechnology Vol 1 : Solid-state Physics, Fluidics, and Analytical Techniques in micro and Nanotechnology .-3rd .-978-1-4200-5511-5
SN  - 978-1-4200-5511-5
U1  - GF:(D65)/ 
PY  - 2012///
PB  - CRC Press, Boca Raton, Boca Raton
ER  -