Madou Marc J <br/><br/>
Fundamentals of Microfabrication and Nanotechnology Vol 1 : Solid-state Physics, Fluidics, and Analytical Techniques in micro and Nanotechnology .-3rd .-978-1-4200-5511-5 

 - 3rd  
 -  CRC Press, Boca Raton, Boca Raton  2012 
<br/><br/><label>ISBN: </label>978-1-4200-5511-5 
<br/><br/><label>Dewey Class. No.: </label>GF:(D65)/