Madou Marc J
Fundamentals of Microfabrication and Nanotechnology Vol 1 : Solid-state Physics, Fluidics, and Analytical Techniques in micro and Nanotechnology .-3rd .-978-1-4200-5511-5
- 3rd
- CRC Press, Boca Raton, Boca Raton 2012
978-1-4200-5511-5
GF:(D65)/